Question 1.
Identify one area of your research pursuit or personal interest. Summarize at least two plausible advantages for MEMS or Nano application (more if applicable). Analyze the scale law for a key figure-of-merit for a specific application within your interest.
Ans:
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Question 2.
Investigate some example of biological “micromachining” and write an abstract of text of how some biological structures with < 1 mm features are formed. Examples are exoskeletons of small insects, seashells, spider webs, and diatoms (microscopic creatures) and their three-dimensional structures. Give proper references and turn in a copy of any particularly interesting paper on web. There are plenty of recent examples of papers on these and related subjects. You need to work on literature search including papers, biology books or web.
Contrast your chosen biological micromachining examples with the micromachining that we might presently carry out at clean room.
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【References】:
1.Thorbjorn Ebefors, Johan U. Mattsson, Edvard Kalvesten and Goran Stemme, "
3D Micromachined Devices Based on Polyimide Joint Technology",
Presented at "Conference on Devices and Process Technologies for MEMS and Microelectronics (SPIE vol. 3892)" (part of SPIE's Symp. on Microelectronics and MEMS), 27-29 October, 1999 at Royal Pines Resort, Gold Coast, Queensland, Australia,
SPIE Vol. 3892, pp. 118-132. (Related Links)
2.
Tom Kenny (Stanford University) ,
MEMS devices for Force Sensing in Biology.(Related Links)
3.
徐玉紋,"振動式微加工陀螺儀簡介",機械月刊第二十一卷第十一期.
4. Chris Painter, "Absolute Angle Measuring Gyroscopes". (Related Links)
5. Roger T. Howe and Jay D. Keasling, " Diatom Nano-structure Project ". (Related Links)
6. Diatoms: Life History and Ecology. (Related Links)